LAM 853-150806-001 high-performance RF match network module

Description

Product Model: 853-150806-001
Product Brand: LAM Research
Product Series / Role: ASM / EIOC CONTA MINI / Spectrometer / Optical Module
Product Features:

• Module described as ASM, EIOC CONTA MINI spectrometer / optical emission module interface.
• Classified by some vendors as an Industrial Control / Spectrometer Module for semiconductor equipment.
• Listed as “As-Is LAM ASM, EIOC CONTA MINI 853-150806-001” in used parts markets, indicating it is field-replaceable in many systems.
• Marketed as high-precision and used in process control / analytical / optical measurement settings.

Applications & Industry Context

Semiconductor manufacturing relies heavily on in situ optical diagnostics to monitor plasma emissions, gas species, contamination, and uniformity. A module like LAM 853-150806-001 appears to serve precisely that role: a spectrometer / optical emission monitoring module integrated into LAM’s tool ecosystem.

In many tools, spectrometer modules are mounted so that they view a plasma region or chamber exhaust via optical windows or fiber couplings. Their output is processed by the control system to adjust gas flows, power, or detect abnormal species. Because optical feedback is often critical for recipe control, module reliability and calibration stability are paramount.

Service engineers often swap units like 853-150806-001 when spectral performance degrades or fails entirely. Because it is a discrete module (often sold “as-is” in the aftermarket), deploying a replacement can restore measurement capability without reworking the entire tool.

One used listing describes the module as “LAM ASM, EIOC CONTA MINI 853-150806-001”, indicating that the unit is part of LAM’s ASM / EIOC CONTA MINI family of modules.

J316Gallery inventory shows a “LAM RESEARCH ASM, EIOC CONTA MINI 853-150806-001” board labeled as pre-owned.

Given this context, 853-150806-001 likely resides in optical / emission analysis branches of LAM tools—etch, plasma, deposition, or chamber health subsystems.

Product Role & System Fit

LAM 853-150806-001 is best seen not as a generic logic or I/O board, but as a spectrometer / module for optical emission measurement—i.e., it is an instrument module, not a control CPU or I/O interface (though it may include interface electronics). Some vendor descriptions call it an “industrial control module,” but also specifically as a spectrometer module.

As such, it fits in the system as a sensory / measurement module. It likely:

• Collects optical spectra from a plasma or process environment (via fiber, optical window, or internal optics)
• Performs signal conditioning, possibly baseline subtraction, spectral line extraction, or pre-processing
• Outputs spectral data or processed concentrations / intensities to the tool logic or analysis systems
• Interfaces via electrical outputs or digital protocols to the control system (Ethernet, RS-485, or other) — some vendor pages mention “supports multiple networking protocols including Ethernet and RS-485.”

Thus, it should plug into an optical / measurement subsystem or chassis in the tool. In spare parts catalogs, it is often sold as a standalone replacement module to be inserted in such subsystems.

Sometimes the module is described in listings as an “Industrial Control Module” or as a “Spectrometer Module,” indicating a dual role (optical sensor + control interface).

Be cautious: because it is specialized, the mechanical footprint, optical coupling, and connector pinouts must match the host tool’s design exactly.

Technical Features & Benefits

From the available vendor descriptions and logical inference, here’s a compilation of what might be true about 853-150806-001:

• High Precision Optical Measurement
  Several vendor pages call it “high-precision spectrometer module” and “spectrometer / industrial optical module.”
• Industrial / Process-Grade Design
  It is marketed for industrial environments, suggesting ruggedness, EMI/EMC protection, and thermal stability.
• Communication & Interface Protocols
  Some vendor descriptions claim support for Ethernet and RS-485 protocols for module communication.
• Electrical / Operating Parameters
  One listing includes:
  • Operating Voltage: 220 V
  • Output Frequency: 50 kHz
  • Compact module size (though exact dimensions not reliably verified)
  • Market / Price Position
    The eBay listing of a used “ASM, EIOC CONTA MINI 853-150806-001” module shows it listed “As-Is” at a relatively high price (~US$4,761.90).

From an operational perspective:

• Replacing the module restores optical monitoring capability—critical when process drift or parameter monitoring is needed.
• Using the exact matched model ensures alignment in calibration, optical response, spectral lines, and tool recipes.
• Because it likely contains optics and sensors, careful handling, alignment, and environmental control are needed.

Technical Specifications Table

Given the limited public data, this table mixes confirmed claims and inferred or vendor-sourced values. Bear in mind that many values should be verified with OEM documentation.

Because I found a vendor page stating weight ~8.990 kg, but that seems unlikely for a compact optical module, that value may refer to crate / packaged weight, or be erroneous.

Installation & Maintenance Insights

Given the sensitive optical nature of this module, here are recommended field practices:

• Optical Alignment & Cleanliness
  Dust, fogging, or misalignment degrade spectrometer performance. Clean optical windows or fiber couplings carefully in a clean environment.
• Warm-up & Stabilization
  Spectrometer modules typically require warm-up to thermal equilibrium before measurement—allow sufficient stabilization time before calibrating or using.
• Connector & Interface Care
  Ensure communication cables (Ethernet, RS-485) or connectors match exactly, are shielded, and fully seated to prevent data corruption or noise.
• Power Protection
  Given that the module may run on 220 V AC, protect against surges or transients. Use line filters or surge suppressors as needed.
• Calibration & Reference Checks
  Periodically run calibration checks (e.g. spectral reference light sources) to confirm spectral accuracy, drift, or degradation over time.
• Spare Module Strategy
  Keep a known-good 853-150806-001 module in spare inventory. Pre-test it so that field swap is minimal downtime.
• Thermal / Environmental Control
  Place the module in stable ambient temperature, avoid mechanical vibration, and protect from humidity or condensation.
• Diagnostic / Output Monitoring
  Monitor baseline noise, signal-to-noise ratio, drift over time. Degradation may indicate aging optics, contamination, or component failure.
• Careful Handling
  Optical modules often contain delicate components (diffraction gratings, sensors). Use ESD precautions, avoid mechanical shock, and handle gently.
• Firmware / Configuration Integrity
  If the module stores calibration tables, alignment coefficients, or firmware, back up those parameters when possible so replacements can reuse them.

In practice, I’ve seen optical modules fail gradually (increased noise, baseline shift) before full failure. Having a spare with the same calibration can greatly reduce downtime when a tool starts misreporting spectral data.