LAM 810-072906-005 specialized control and interface module
LAM 810-072906-005 specialized control and interface module
The LAM 810-072906-005 is a specialized control and interface module, meticulously designed for the semiconductor manufacturing sector. It is a product of LAM Research, a globally recognized leader in providing advanced equipment and solutions for semiconductor fabrication.
Model 810-072906-005
Brand LAM Research
Type Control and Interface Module
Power Supply 24V DC
Operating Temperature – 10°C to 50°C
Mounting screw – mounted on a specific chassis
Interfaces Ethernet, RS – 485, digital I/O
Certifications CE
Cooling natural convection
The LAM 810-072906-005 is a specialized control and interface module, meticulously designed for the semiconductor manufacturing sector. It is a product of LAM Research, a globally recognized leader in providing advanced equipment and solutions for semiconductor fabrication.
810-072906-005
As a control and interface module, the LAM810-072906-005 serves as a vital link between different subsystems within semiconductor manufacturing equipment. It acts as a central hub, receiving commands from higher – level control units, such as programmable logic controllers (PLCs), and then translating these commands into actionable signals for various actuators, sensors, and other peripheral devices.
In the overall architecture of semiconductor manufacturing systems, the LAM 810-072906-005 occupies a critical position. It interfaces with gas delivery systems, temperature and pressure control units, and robotic material handling systems, among others. For engineers and integrators in the semiconductor field, this module offers significant value. Its compatibility with a wide range of existing semiconductor manufacturing equipment simplifies the process of system integration and upgrades. It provides a reliable and efficient means of controlling and coordinating the complex operations within a semiconductor fabrication plant, allowing engineers to focus on optimizing the overall production process rather than grappling with the intricacies of individual component control.
810-072906-005
Main features and advantages:
The LAM 810-072906-005 boasts several remarkable technical features and functional benefits. In terms of control precision, it is engineered to provide highly accurate regulation of various parameters. For example, when controlling gas flow rates in etching processes, it can achieve flow rate adjustments with a resolution of [X] units, ensuring that the etching process is consistent across all wafers. This high – level precision is crucial for maintaining the quality and yield of semiconductor chip production.
The module’s response time is extremely fast. It can detect changes in input signals and adjust its output commands within milliseconds. This rapid response is essential in semiconductor manufacturing, where real – time adjustments are often required to counteract any sudden fluctuations in process conditions. For instance, in deposition processes, if there is a sudden change in temperature, the LAM 810-072906-005 can quickly adjust the heating or cooling systems to bring the temperature back to the optimal range, preventing any adverse effects on the film deposition quality.
In terms of hardware design, the LAM 810-072906-005 is compact and rugged. Its compact size allows for easy installation in tight spaces within semiconductor manufacturing equipment, which often have limited room for additional components. The rugged construction is designed to withstand the harsh environmental conditions of a semiconductor factory, including temperature variations, vibrations, and chemical exposure. The module is also equipped with advanced shielding to protect against electromagnetic interference, ensuring stable operation even in electrically noisy environments.
Compatibility is another strong suit of the LAM 810-072906-005. It supports a wide range of industry – standard communication protocols, such as Ethernet, RS – 485, and CAN bus. This enables seamless integration with different types of control systems and peripheral devices, whether they are from LAM Research or other manufacturers. It also has a modular design, which allows for easy expansion or modification of its functionality. For example, additional input or output channels can be added as needed to accommodate changes in the semiconductor manufacturing process requirements.
810-072906-005
Technical specifications:
Model 810-072906-005
Brand LAM Research
Type Control and Interface Module
Power Supply 24V DC
Operating Temperature – 10°C to 50°C
Mounting screw – mounted on a specific chassis
Interfaces Ethernet, RS – 485, digital I/O
Certifications CE
Cooling natural convection
Contact Us Phone:+86 16626708626 WeChat/WhatsApp:+86 16626708626 Email: 3772179818@qq.com
Application areas:
In the highly intricate and demanding landscape of semiconductor manufacturing, precision and reliability are the linchpins of success. The LAM 810 – 072906 – 005 emerges as a critical component, playing a pivotal role in enabling seamless and high – quality production processes.
Semiconductor fabrication plants rely on this device for a multitude of essential functions. During the wafer etching process, which is fundamental to creating the minute and complex patterns on semiconductor wafers, the LAM 810-072906-005is involved in accurately controlling the flow of etching gases. It ensures that the gas delivery system operates with pinpoint precision, as any deviation in gas flow rate or composition could lead to uneven etching, resulting in defective semiconductor chips. This not only impacts the quality of the final product but also incurs significant financial losses due to wasted materials and production time.
Moreover, in the deposition processes where thin films are layered onto the wafers to build the various components of a semiconductor chip, the LAM 810-072906-005 plays a crucial role in regulating the temperature and pressure conditions. It interfaces with the control systems that manage these parameters, guaranteeing stable and consistent conditions for optimal film deposition. This is essential for achieving the desired electrical and physical properties of the deposited films, which are vital for the proper functioning of the semiconductor devices.
In addition, within the automated material handling systems in semiconductor factories, the LAM 810-072906-005 contributes to the precise movement and positioning of robotic arms that handle delicate wafers. It provides the necessary control signals and power management to ensure that the robotic arms operate smoothly and accurately, minimizing the risk of wafer damage during transportation between different processing stations. This helps in maintaining the high – yield production rates that are essential in the competitive semiconductor industry.
Related products:
LAM 810 – 069751 – 114 – A related printed circuit board from LAM Research. It may be used in tandem with the LAM 810 – 072906 – 005 in more complex semiconductor manufacturing setups. The LAM 810 – 069751 – 114 could handle power management and basic electrical connections, while the LAM 810 – 072906 – 005 focuses on control and communication functions.
LAM 810 – 017086 – 003 – An electrostatic chuck/esc power supply board by LAM Research. In semiconductor manufacturing processes that involve electrostatic chucks for wafer handling, this board could be integrated with the LAM 810 – 072906 – 005. The LAM 810 – 072906 – 005 would control the operation of the electrostatic chuck through its interface and control capabilities, and the power supply board would provide the necessary electrical power.
LAM 605 – 109114 – 003 – A PCBA with a CPU 7668 VxWin. This module could work together with the LAM 810 – 072906 – 005 in a more comprehensive semiconductor manufacturing control system. The LAM 605 – 109114 – 003 might be responsible for high – level data processing and control algorithms, while the LAM 810 – 072906 – 005 takes care of the interface and real – time control functions for the equipment.
LAM 810 – 001489 – 016 – A PCBA rocker valve interface board. In semiconductor manufacturing processes that involve fluid control or mechanical movement, this board could be connected to the LAM 810 – 072906 – 005. The LAM 810 – 072906 – 005 would send control signals to the rocker valve interface board, which in turn would control the movement of valves related to gas or liquid flow in the manufacturing process.
LAM 853 – 049542 – 173 – A circuit board module that may have applications in temperature control or other auxiliary functions within semiconductor manufacturing. It could be interfaced with the LAM 810 – 072906 – 005 to enhance the overall functionality of the manufacturing system. For example, the LAM 810 – 072906 – 005 could receive temperature sensor data and then use the LAM 853 – 049542 – 173 to adjust the temperature control equipment accordingly.
Installation and maintenance:
Before installing the LAM 810-072906-005, it is essential to ensure that the installation area in the semiconductor manufacturing equipment is clean and free from any debris. The module should be installed in a location with proper ventilation to prevent overheating, as high temperatures can significantly degrade its performance. Grounding is of utmost importance. A proper grounding connection will protect the module from electrical surges and ensure accurate signal transmission, which is critical in semiconductor manufacturing processes. Additionally, make sure that there is enough clearance around the module for easy access to its connectors and components during future maintenance or upgrades.
For maintenance, regular visual inspections are highly recommended. Check for any signs of physical damage, such as cracks on the module, burnt – out components, or loose connections. Periodic electrical testing should be carried out to verify that the module is operating within its specified control and interface parameters. Keeping the module clean from dust and contaminants is also important, as these can interfere with the electrical performance over time. If any issues are detected, it is advisable to refer to the official LAM Research documentation or contact their technical support team for guidance on replacement or repair procedures.
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