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Phone: +86 16626708626Description
The LAM 810-066590-004 is a high-precision process control module manufactured by LAM Research Corporation, widely used in semiconductor manufacturing equipment. This module serves as a 3-axis stepper motor driver interface, controlling up to three stepper motors simultaneously. It is essential in applications requiring precise positioning and motion control, such as in wafer handling robots, deposition systems, and other semiconductor fabrication machinery. The 810-066590-004 module translates control signals into accurate motor movements, ensuring the smooth and reliable operation of critical semiconductor tool components.
Engineered for industrial automation environments, this module features a 16-bit analog-to-digital converter for high signal resolution, enabling precise control with ±0.1% accuracy. It operates reliably within a wide temperature range from -20°C to 70°C, suitable for the cleanroom and manufacturing conditions typical of advanced semiconductor fabs. The module supports common industrial communication protocols including Ethernet/IP and RS-485 Modbus, facilitating integration into diverse control systems across manufacturing lines. Its compact size (approximately 100 x 60 x 30 mm) and lightweight design (about 310-500 g) make it an adaptable component within the limited spaces of semiconductor process tools.
| Parameter | Value |
|---|---|
| Model | 810-066590-004 |
| Brand | LAM Research Corporation |
| Product Type | Process Control Module / 3-Axis Stepper Driver Interface |
| Signal Resolution | 16-bit ADC |
| Control Accuracy | ±0.1% full scale |
| Communication Protocols | Ethernet/IP, RS-485 Modbus |
| Input Voltage | 24 V DC ±10% |
| Operating Temperature | -20°C to 70°C |
| Dimensions (L×W×H) | 100 × 60 × 30 mm |
| Weight | 310 g – 500 g |
- 810-066590-004
- 810-066590-004
Related modules often working with the LAM 810-066590-004 include:
LAM 810-069751-104 – Power module providing stable power delivery for the control system.
LAM 810-066590-005 – Similar stepper driver module variant supporting additional motor axes.
LAM 810-067890-002 – Sensor interface board used to feedback motor position and speed data.
LAM 810-068234-001 – Control processor board coordinating multi-module operations within the tool.
Installation of the 810-066590-004 demands adherence to cleanroom-compatible procedures, proper grounding, and secure electrical connections to minimize electromagnetic interference. Maintenance includes regular inspection of connectors, firmware updates for compatibility and performance optimization, and validation of motor control accuracy through system diagnostics. Its design prioritizes reducing signal cross-talk and ensuring stable pulse counting up to 1 kHz for smooth motor operation.
